[20p-D901-1~9] 16.3 Bulk, thin-film and other silicon-based solar cells

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[20p-D901-3] Damp-Heat Stability of Cat-CVD SiN_x and SiO_yN_x films formed by various conditions

〇Tu ThiCam Huynh¹, Keisuke Ohdaira¹ (1.JAIST)

Keywords:

Cat-CVD SiNx,Protection Layer,Damp Heat Test