[20p-P07-1~49] 1 Interdisciplinary Physics and Related Areas of Science and Technology (Poster)

[20p-P07-14] Effect of the surfactant for wet etching of Si using metal catalyst

〇(M1)TAKUMI DOE¹, SYOUGO MURAKAMI¹, TAKESHI ITO¹, SHOSO SINGUBARA¹, TOMOHIRO SHIMIZU¹ (1.Kansai Univ.)

Keywords:

wet etching,semiconductor