Presentation Information

[21a-A305-10]Development of a Radiation-resistant Color Camera with Dielectric Thin-film Mosaic RGB Filter

〇Hironari Takehara1, Keinoshin Takada1, Makito Haruta2,1, Hiroyuki Tashiro3,1, Kiyotaka Sasagawa1, Hirokazu Ikeda4, Kazuhide Noguchi4, Yuuto Suzuki5, Yoshinori Fujita5, Koichi Kitamura5, Jun Ohta1 (1.NAIST, 2.Chitose Inst. Sci. Tech., 3.Kyushu Univ., 4.Mach Corp., 5.Taiyo Mfg.)

Keywords:

image sensor,radiation-resistant,dielectric thin-film filter

We developed a radiation-resistant camera that can acquire color images. A mosaic-patterned RGB filter was fabricated using dielectric thin-film stack technology on a radiation-resistant glass wafer. The spectral transmittance for each color was controlled by adjusting the thicknesses of the middle and top layers of the stack. Bonding a fabricated filter and a monochrome image sensor was carried out, aligning the position by monitoring the image signal. The acquired images exhibit good color reproductivity.