Presentation Information
[21a-C402-1]Hall mobility of phosphorus doped n-type (111) diamond films doped with TBP
〇Hiroyuki Kawashima1, Riku Kawase1, Hiromitsu Kato2, Norio Tokuda3, Satoshi Yamasaki3, Masahiko Ogura2, Toshiharu Makino2, Naoya Morioka1,4, Norikazu Mizuochi1,4 (1.Kyoto Univ., 2.AIST, 3.Kanazawa Univ., 4.CSRN)
Keywords:
diamond semiconductor,phosphorus doped,mobility