Presentation Information
[21a-P02-10]Development of epitaxial piezoelectric films for microminiaturized ultrasonic sensor and their applications
〇Takuya Mizunuma1, Mizuki Iriyama2, Taketoshi Minato3, Minoru Kurosawa4, Hiroshi Funakubo4, Masashi Ikegami1, Mutsuo Ishikawa2 (1.Graduate School of Engineering, Toin University of Yokohama, 2.Faculty of Biomedical Engineering, Toin University of Yokohama, 3.Institute for Molecular Science, 4.Tokyo Institute of Technology)
Keywords:
Piezoelectric films,Hydrothermal method,Ultrasound
In recent years, tactile sensors have been attracting attention due to social demand, and research reports on piezoelectric-type sensors have been active from the viewpoints of miniaturization, durability, and low-power drive. However, there are still few reports on ultra-compact and highly functional tactile sensors and actuators. Therefore, this research group developed piezoelectric micro-ultrasonic transducers for tactile sensors using perovskite-type piezoelectric KNbO3 epitaxial films, and reported the basic evaluation of the transducers to realize miniaturization and high functionality of the tactile sensors.