[21a-P02-1~10] 6.1 Ferroelectric thin films

[21a-P02-2] Non-heated growth of Ferroelectric Hf_0.5Zr_0.5O₂ Thin Films by Digitally Processed DC Sputtering

〇Daiki Yamashita¹, Satoshi Fujiya¹, Koki Takamura¹, Hideo Isshiki¹ (1.The Univ. of Electro-Communications)

Keywords:

ferroelectric,photonic modulator