[21a-P02-1~10] 6.1 Ferroelectric thin films

[21a-P02-6] Electrical characteristics of Nb/KNaNbO₃/Nb three layer structures
fabricated by a shadow mask method

〇Ayumi Nakajima¹, Shun Tanaka¹, Koji Takamura¹, Tomoyuki Taira¹ (1.KOSEN, Asahikawa Col.)

Keywords:

Piezoelectric thin film

It has been reported that the dielectric constant of sodium potassium niobate (KNN) is affected by changes in the composition of thin films. To clarify this effect, we investigated a method of contacting the bottom electrode in a metal/KNN/metal tri-layer structure without using photolithography. It was found that the current value could be varied by an order of magnitude by depositing an top electrode of different size from the KNN. Also, our results indicates that the KNN thin film is not completely insulated, suggesting a defect in the KNN thin film.