Presentation Information
[21a-P02-9]Perovskite-structured piezoelectric single crystal films by hydrothermal epitaxy for ultrasonic sensors.
〇Kaoru Yoshida1, Taketoshi Minato3, Tatsuya Mishima4, Minoru Kurosawa5, Hiroshi Funakubo5, Masashi Ikegami1, Mutsuo Ishikawa2 (1.Graduate School of Engineering, Toin University of Yokohama, 2.Faculty of Biomedical Engineering, Toin University of Yokohama, 3.Institute for Molecular Science, 4.Kyorin University, 5.Tokyo Institute of Technology)
Keywords:
piezoelectric films,ultrasound,Hydrothermal method
Epitaxial KNbO3 piezoelectric crystal films with different orientations were formed on a SrTiO3 substrate by hydrothermal method, and obtained single-crystal freestanding KNbO3 piezoelectric crystal film without substrate by detached from the substrate.
The several piezoelectric crystal films obtained were observed by laser microscopy, measured by piezoelectric response microscopy (PFM) and laser Doppler vibrometry (LDV), and considering the piezoelectric crystal films for utilizing in hydrophones.
The several piezoelectric crystal films obtained were observed by laser microscopy, measured by piezoelectric response microscopy (PFM) and laser Doppler vibrometry (LDV), and considering the piezoelectric crystal films for utilizing in hydrophones.