Presentation Information
[21a-P03-8]Crystallographic Orientation Dependence of Physical Properties of Epitaxial Mn-doped ITO Films
〇Saiki Kitagawa1,2,3, Toshihiro Nakamura1,3 (1.Kyoto Univ., 2.Japan Society for the Promotion of Science, 3.ILAS, Kyoto Univ.)
Keywords:
Diluted Magnetic Semiconductor,Transparent Conducting Film,Epitaxial Growth
In recent years, dilute magnetic semiconductors have attracted much attention for the development of next-generation devices. Mn-doped indium tin oxide (ITO) films is one of the promising matelials, which shows high electrical conductivity, high visible transparency, and room-temperature ferromagnetism. In this work, we prepared epitaxial Mn-dooped ITO films with different crystallographic orientation and investigated the correlation between the crystallographic orientation and physical properties of the films.