[21a-P04-1~11] 6.5 Surface Physics, Vacuum

[21a-P04-11] Development of a Raman microscopy system with four tips for operando analysis

〇(M2)Kenta Oishi^1,2,3, Riku Gotoh^1,3, Masato Kotsugi¹, Naoka Nagamura^1,2,3 (1.Tokyo Univ. of Science, 2.JST PRESTO, 3.NIMS)

Keywords:

Raman spectroscopy,Operand measurement,Multiprobe prober

By combining a confocal Raman microscope with high spatial resolution and a piezoelectric precision-driven four-probe prober, we aimed to obtain information on the spatial distribution of chemical bonding states, carrier density, stress, etc. while applying a local electric field to atomic layer nanosheet materials and micro device structures based on them, we developed the "MORINGA" (Multi-probe Operando Raman Imaging for Nano-scale Gate-tuning Analysis), a four-probe microscopic Raman spectroscopy system.