[21a-P04-1~11] 6.5 Surface Physics, Vacuum

[21a-P04-5] Control of Ti film structure for nonevaporable getter coating

〇Takuya Ohba¹, Takeo Nakano¹, Mian Md. Suruz¹, Sae Tamagawa¹, Kazuhiko Mase² (1.Seikei Univ., 2.KEK)

Keywords:

Thin Film,surface,nonevaporable getter coating