[21p-A307-1~23] 6.3 Oxide electronics

5:45 PM - 6:00 PM JST(8:45 AM - 9:00 AM UTC)

[21p-A307-18] Control of Crystal Structure and Physical Properties of Titanium Oxide by Laser Irradiation

〇Masaki Tsutsumi¹, Hidekazu Tanaka² (1.Murata Manufacturing, 2.Osaka Univ.)

Keywords:

semiconductor,laser,titanium oxide

To regioselectively form titanium oxide with desired properties, we attempted to control the crystal structure and electrical conductivity by UV laser irradiation. The crystal structure of titanium oxide after laser irradiation systematically changed into rutile TiO₂, Ti₃O₅ and Ti₂O₃ structure depending on the fluence. Correspondingly, the electrical conduction mechanism changed from band conduction to VRH conduction.