[21p-A307-1~23] 6.3 Oxide electronics

6:15 PM - 6:30 PM JST(9:15 AM - 9:30 AM UTC)

[21p-A307-20] Crystallinity control of LiTiO thin film by RF power in plasma sputtering process and its application to the Li-ion batteries

〇Ryoto Niwa¹, Masayuki Ishihara¹, Tomoki Omae¹, Tomohisa Nakada¹, Reon Yokoi¹, Ryo Hanai¹, Kodai Masumoto¹, Giichiro Uchida¹ (1.Meijo Univ.)

Keywords:

Li ion battery,sputtering