Presentation Information

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)English Presentation

[21p-A309-6]An electromechanical cantilever actuator with a high mechanical resonant frequency exceeding 1.5 MHz used for THz metamaterials

〇Ying Huang¹, Taiyu Okatani¹, Yoshiaki Kanamori¹ (1.Tohoku Univ.)

Keywords:

Metamaterials,THz waves,MEMS

To further develop terahertz (THz) technologies that are potential in the upcoming application field beyond-5G, electromechanically reconfigurable metamaterial (MM) that can dynamically manipulate the transmission of THz waves is of interest. In this study, we optimized the operational speed of our prior work, a reconfigurable ladder-shaped MM (LS-MM) based on micro-electro-mechanical systems (MEMS) cantilever switches. The mechanical resonant frequency (f_mr) of the cantilever was further experimentally increased to reach 1.54 MHz by introducing a dimple structure.

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