講演情報
[21p-A309-6]An electromechanical cantilever actuator with a high mechanical resonant frequency exceeding 1.5 MHz used for THz metamaterials
〇Ying Huang1, Taiyu Okatani1, Yoshiaki Kanamori1 (1.Tohoku Univ.)
キーワード：
Metamaterials、THz waves、MEMS
To further develop terahertz (THz) technologies that are potential in the upcoming application field beyond-5G, electromechanically reconfigurable metamaterial (MM) that can dynamically manipulate the transmission of THz waves is of interest. In this study, we optimized the operational speed of our prior work, a reconfigurable ladder-shaped MM (LS-MM) based on micro-electro-mechanical systems (MEMS) cantilever switches. The mechanical resonant frequency (fmr) of the cantilever was further experimentally increased to reach 1.54 MHz by introducing a dimple structure.