[21p-D902-1~17] 12.7 Biomedical Engineering and Biochips

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[21p-D902-2] Interface design for biosensing application of ITO-based one-piece solution-gated thin film transistor

〇(M2)Ritsu Katayama¹, Akiko Saito¹, Toshiya Sakata¹ (1.The Univ. of Tokyo)

Keywords:

Indium tin oxide (ITO),Biosensor,Interface

ITO, widely used as conductive oxide, works as a semiconductor with a thickness of less than 30 nm. Therefore, it is possible to fabricate fine solution-gate ITO-TFTs showing good transistor properties by controlling the thickness to about 20 nm by etching a part of a 100 nm conductive ITO film. In this study, we have designed the sensing membrane and investigated its bioaffinity for biosensing application of ITO-based one-piece solution-gated thin film transistors.