Presentation Information
[21p-D903-13]Low Refractive Index SiO2 Optical Thin Film Deposited by Sputtering and Electron Beam Evaporation part 3
〇(D)Naoya Tajima1, Hiroshi Murotani1, Takayuki Matsudaira2 (1.Tokai Univ., 2.SHINCRON CO.LTD.)
Keywords:
optical thin film,SiO2,packing density