[21p-P01-1~14] 8.1 Plasma production and diagnostics

[21p-P01-2] Relationship between electrical properties of atmospheric pressure plasma jet and temperature at plasma generation section

〇(BC)Soma Chiku¹, Takuto Nozawa¹, Shoma Sakamoto¹, Hiromasa Yamada¹ (1.NIT Nagano college)

Keywords:

Low-temperature atmospheric pressure plasma,Charged particles,Temperature measurement

The generation and control of charged particles is one of the key factors in applications using atmospheric pressure and low temperature plasma. In this study, for the purpose of stable control of charged particles, the time variation of the amount of charged particles flowing into the irradiated target during plasma irradiation was evaluated. As a result, the amount of charged particles increased with time, and the variation of the amount of charged particles also increased. This study focused on the temperature rise of the plasma source as a possible cause and analyzed the relationship between the temperature rise and the change in charged particle behavior.