[21p-P15-1~9] 3.6 Laser processing (formerly 3.7)

[21p-P15-3] Processing of polyimide by He-free short-pulse CO₂ laser

〇Ryo Okawa¹, Kazuyuki Uno¹, Shohei Watarai², Yasushi Kodama^1,2, Kazuyuki Yoneya² (1.Yamanashi Univ., 2.Seidensha Electronics)

Keywords:

CO2 laser,Polyimide,Laser processing

A study was conducted to investigate the cutting process of polyimide using a high repetition rate and high power He-free CO₂ laser. Tailed and tail-free short pulses were used for the process. Three types of changes, namely whitening, blackening, and cutting were observed by adjusting the scanning speed. In the case of whitening, no conductivity was observed.However, for blackening, the samples exhibited conductivity, indicating carbonization.On the cut surfaces, blackening was observed, but there was variation in conductivity, with some samples displaying conductivity and others not.