Presentation Information
[21p-P15-8]Advancement of near-threshold laser processing of nanofilms
〇Tetsuro Kobayashi1, Yuuki Uesugi1, Yuichi Kozawa1, Shunichi Sato1 (1.IMRAM, Tohoku Univ.)
Keywords:
microfabrication
We have developed the femtoseconmd-laser micro/nanoprocessing of thin films. In this study, we applied automated control of the laser irradiation system and sample stage system to improve our laser processing method. As a result, many processes can be made in a short time, allowing efficient investigation of machining parameters, such as ablation thresholds. In addition, complex shapes or patter that were difficult to machine in the past have become possible.