[21p-P16-1~12] 3.7 Optical measurement, instrumentation, and sensor (formerly 3.8)

[21p-P16-12] Hydrogen Sensor based on Goos-Hnchen Shift Measurement using Guided-Mode Resonant Grating on Vacuum Deposition Pd Film

〇(M2)Hirotaka Shimizu¹, Gyoyu Ou¹, Akio Mizutani¹, Hisao Kikuta¹ (1.Osaka Metro Univ.)

Keywords:

hydrogen sensor,microfabrication,optical sensor