[21p-P16-1~12] 3.7 Optical measurement, instrumentation, and sensor (formerly 3.8)

[21p-P16-4] Determinable Maximum thickness with imaging ellipsometry

〇Lianhua Jin¹, Yoriatsu Kitamura¹, Eiichi Kondoh¹, Gelloz Bernard² (1.Univ. Yamanashi, 2.Nagoya Univ)

Keywords:

imaging ellipsometry,film thickness measurement