Presentation Information
[21p-P23-6]Pulse Laser Deposition of magneli phase titanium oxide thin films
〇Taiga Matsuhashi1, Hiroyuki Yamaguchi1, Takao Komiyama1, Yasunori Chonan1, Koji Kotani1, Kiyoshi Fuda2, Yasushi Sugawara3, Takashi Sekine3, Shigeaki Sugiyama4 (1.Akita Pref Univ, 2.Akita Univ, 3.Akita Ind Tech Center, 4.Dept of Ind and Labor, Akita Pref Gov)
Keywords:
magneli,titanium oxide,film
Titanium dioxide is well known as a photocatalyst. It can be converted to the magneli phase by introducing an oxygen deficiency. The magneli phase has been reported to have high electrical conductivity and low thermal conductivity in bulk seramics, therefore, it is expected as a hopeful thermoelectric material. We have tried to deposit the magneli phase by the PLD method using a target prepared by the SPS method. In this presentation, we will report the effects of oxygen content of the target and oxygen pressure during deposition on the thin film properties.