[22a-A304-1~10] 6.4 Thin films and New materials

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[22a-A304-2] Depth analysis of copper films prepared with copper chelate complex solutions

〇Sosuke Hirotaki¹, Keiji Komatsu¹, Atsushi Nakamura², Osamu Ito², Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech., 2.Chubu Chelest Co., Ltd.)

Keywords:

chelate complex solutions,Cu films,Depth analysis