Presentation Information
[22a-C601-9]Development of an all-in-one-chamber process for halide perovskite solar cell structures via laser molecular beam deposition
〇Fukano Sota1, Ching-Feng Chen1, Tomomasa Sato1, Nobuyuki Matsuki1 (1.Kanagawa Univ.)
Keywords:
Perovskite solar cells,Laser molecular beam depositiion
To develop an all-in-one-chamber process for perovskite solar cells, in which the electron transport layer, perovskite layer, and hole transport layer are fabricated successively in a high vacuum by laser molecular beam deposition (LMBD), we have investigated a device process that includes mask patterning.