Presentation Information
[22a-D903-8]Effect of MoO3 deposition on fabrication of top-contact electrodes without noble metals
〇Naoki Koremura1, Rei Mizoguchi1, Xu Jin1, Norio Onojima1 (1.Univ. of Yamanashi)
Keywords:
non-noble metal electrode,top-contact OFET,XPS
We previously fabricated OFETs using non-noble metal electrodes and deposited MoO3 at the bottom of the electrodes, and obtained good transistor characteristics equivalent to those of Au electrodes. However, the specific mechanism of the formation of the non-noble metal top contact electrode by MoO3 deposition was unknown. In this study, the MoO3 layer was observed using XPS depth analysis, and the penetration of Mo atoms into the active layer and the formation of multiple oxidation levels of Mo atoms were confirmed.