The 84th JSAP Autumn Meeting 2023
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Tue. Sep 19, 2023
Wed. Sep 20, 2023
Thu. Sep 21, 2023
Fri. Sep 22, 2023
Sat. Sep 23, 2023
JSAP EXPO (Exhibition) 1
Vacuum
Materials
Photonics
Laser
Analytical
Thin-Film
Electrical
Chiller
Software
M＆BE
JSAP EXPO (Exhibition) 2
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Presentation Information
2:35 PM - 3:05 PM JST
(5:35 AM - 6:05 AM UTC)
[22p-A401-4]
Utilization of IDEA for the Semiconductors‘ LCA
〇Kiyotaka Tahara
1
, Hiroki Hatayama
1
(1.AIST)
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Keywords:
semiconductor
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