The 84th JSAP Autumn Meeting 2023
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Session Details

Symposium (Oral)Symposium : Systematic Building of Green and Sustainable Semiconductor Manufacturing Technologies

[22p-A401-1~10]Systematic Building of Green and Sustainable Semiconductor Manufacturing Technologies

Fri. Sep 22, 2023 1:30 PM - 5:50 PM JST
Fri. Sep 22, 2023 4:30 AM - 8:50 AM UTC
A401 (KJ Hall)
Noriyuki Uchida(AIST), Kotaro Makino(AIST)
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1:30 PM - 1:35 PM JST(4:30 AM - 4:35 AM UTC)

[22p-A401-1]Opening

〇Noriyuki Uchida1 (1.AIST)
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1:35 PM - 2:05 PM JST(4:35 AM - 5:05 AM UTC)

[22p-A401-2]The study of Green Sustainable on semiconductor manufacturing

〇Kazunori Kato1 (1.Advanced Interface Technolgy Corp.)
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2:05 PM - 2:35 PM JST(5:05 AM - 5:35 AM UTC)

[22p-A401-3]Forwarding Life-Cycle Assessment Study of Semiconductors

〇Kazuyo Mastubae1 (1.Tohoku Univ.)
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2:35 PM - 3:05 PM JST(5:35 AM - 6:05 AM UTC)

[22p-A401-4]Utilization of IDEA for the Semiconductors‘ LCA

〇Kiyotaka Tahara1, Hiroki Hatayama1 (1.AIST)
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3:05 PM - 3:35 PM JST(6:05 AM - 6:35 AM UTC)

[22p-A401-5]Challenge to visualization of supply chain CO2 emissi ons utilizing digital technology

〇Koichi Inagaki1 (1.NEC Corporation)
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3:45 PM - 4:15 PM JST(6:45 AM - 7:15 AM UTC)

[22p-A401-6]Sustainabile Activities in ROHM Semiconductor Manufacturing

〇Yoshiyuki Shigenobu1 (1.ROHM)
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4:15 PM - 4:45 PM JST(7:15 AM - 7:45 AM UTC)

[22p-A401-7]Monitoring technologies for semiconductor manufacturing process to reduce environmental impact

〇Masakazu Minami1 (1.HORIBA STEC)
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4:45 PM - 5:15 PM JST(7:45 AM - 8:15 AM UTC)

[22p-A401-8]Flow rate standard for semiconductor process gases

〇Toshihiro Morioka1 (1.AIST)
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5:15 PM - 5:45 PM JST(8:15 AM - 8:45 AM UTC)

[22p-A401-9]Four informatics in material science

〇Yuma Iwasaki1 (1.NIMS)
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5:45 PM - 5:50 PM JST(8:45 AM - 8:50 AM UTC)

[22p-A401-10]Closing

〇Kanayama Toshihiko1 (1.AIST)
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