[22p-A501-1~16] 6.5 Surface Physics, Vacuum

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[22p-A501-10] Resolution Improvement by Fluorescent Thin Film Arrangement in Electron Beam Assisted Microscopy

〇Kei Hosomi¹, Shunpei Shiba², Atsushi Nakamura^1,2, Wataru Inami^1,2, Yoshimasa Kawata^1,2 (1.Shizuoka Univ. RIE, 2.Shizuoka Univ.)

Keywords:

fluorescent thin film,resolution,EXA microscopy