[22p-A602-1~17] 3.7 Optical measurement, instrumentation, and sensor (formerly 3.8)

5:30 PM - 5:45 PM JST(8:30 AM - 8:45 AM UTC)

[22p-A602-17] Analysis of CO2 gas concentration during carbon nanotube growth in vacuum using NDIR method

〇sangwoon Park¹ (1.Setunan Univ.)

Keywords:

Non-Dispersive InfraRed,Carbon nano tube

Because the NDIR method measures gases extracted using a carrier gas and infrared absorption in an averaged space, CO2 monitoring in a vacuum and during the process of fabricating materials is very confusing, and we have attempted to apply the NDIR method in a vacuum by measuring CO2 gas concentration in carbon nanotube (CNT) growth using the CVD method. The application of the NDIR method for the measurement of CO2 gas concentration in CNT growth using the CVD method was attempted.