Presentation Information
[22p-B202-10]Analysis of Plate Acoustic Wave Resonance Properties on Thin-LiNbO3/SiC Plate
〇Noriyuki Watanabe1, Shoji Kakio1 (1.Univ. of Yamanashi)
Keywords:
plate acoustic waves resonator,Lithium niobate thin plate,Lamb waves
In next-generation communication systems, acoustic wave RF devices are required to have high performance. In recent years, with the progress of thinning technology by bonding multiple layers to piezoelectric substrates, many studies on Lamb wave mode using thinned piezoelectric substrates have been reported. In this report, we investigated in detail the Lamb wave mode resonance properties of a new structure in which SiC is bonded to a thin LiNbO3 substrate. As a result, an SH0 mode resonator with an effective electromechanical coupling coefficient of 29% and an S0 mode resonator with that of 21% were obtained.