[22p-B202-1~16] 1.6 Ultrasonics

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[22p-B202-8] Evaluation of Shear Horizontal Surface Acoustic Wave Sensor by Finite Element Method

〇(M2)Yudai Ota¹, Jun Kondoh¹ (1.Shizuoka Univ.)

Keywords:

shear horizontal surface acoustic wave sensor,Finite Element Method

Shear horizontal surface acoustic wave sensors are used to measure viscosity, density, dielectric constant, and conductivity. Numerical analysis and perturbation methods have been used to evaluate these sensors. These methods are difficult to evaluate for sensor structures. In this paper, it is confirmed that the velocity change obtained by the finite element analysis agrees with the numerical analysis method. This comparison shows that the finite element method can be used to evaluate sensors. In the future, we will optimize the sensor structure, such as the joint structure.