Presentation Information
[22p-B205-10]Selective Metal Deposition using Organic Films - Controlling Factor of Metal Atom Desorption and Metal Pattern Preparation based on Maskless Vacuum Deposition –
〇Tsuyoshi Tsujioka1 (1.Osaka Kyoiku Univ.)
Keywords:
selective metal deposition,surface free energy,organofluorine surface
Selective metal deposition is a function of organic surfaces on which metal patterns can be formed by maskless deposition. Previously, we reported selective deposition of Mg and Pb using photochromic diarylethene, but it could not be realized with Ag and Cu. We found that perfluoropolyether-based materials with smalldispersive component of surface energy and surface flexiblity exhibits this function for a wide variety of metal atoms. Using this material, metal pattern formation using maskless vacuum-deposition for various metal species was demonstrated.