[22p-B205-1~19] 12.1 Fabrications and Structure Controls

5:15 PM - 5:30 PM JST(8:15 AM - 8:30 AM UTC)

[22p-B205-14] Fabrication of Organic-Inorganic Hybrid Layers on ZnO Nanowires
and Their Thermal Stability

〇(M1)Sae Mitamura¹, Takeshi Ono¹, Takuro Hosomi¹, Hikaru Saito², Midori Ikeuchi², Jiangyang Liu¹, Kazuki Nagashima³, Tsunaki Takahashi¹, Wataru Tanaka¹, Masaki Kanai¹, Takeshi Yanagida^1,2 (1.Eng., The Univ. of Tokyo, 2.IMCE, Kyushu Univ., 3.RIES, Hokkaido Univ.)

Keywords:

Organic-Inorganic Hybrid Nanolayer,Atomic Layer Deposition,Self assembled monolayers

With the demand for further complexity and sophistication in nanofabrication technology, there are high expectations for the development of precise chemical-grown deposition technology using atomic layer deposition (ALD). In this research, by focusing on the phenomenon of ALD growth originating from hydroxyl groups on self-assembled organic monolayers (SAMs), We have succeeded in synthesizing multiple layers consisting of SAMs and metal oxides on nanowires, thus, forming the alternating layers of organic films and metal oxides, on nanowires. Further experiments on the thermal stability of these structures were conducted.