[22p-P06-1~3] 13.2 Exploratory Materials, Physical Properties, Devices

[22p-P06-3] Effects of heat treatment for copper nitride thin films on the formation of copper iodide thin films by immersion in iodine ethanol solution

〇hayato kokenawa¹, tetsuya kaneko¹, masao isomura¹ (1.Tokai Univ.)

Keywords:

semiconductor,thin film

We have been iodizing copper nitride thin films by immersing them in ethanol iodine solution to prepare copper iodide. However, in this method, the influence of the state of the copper nitride thin film, which is the starting material, on the formation of copper iodide remains to be clarified in many respects. In this study, we investigated the effects of annealing on the formation and properties of copper iodide thin films by performing pre-annealing after the copper nitride thin film is deposited, followed by iodination in an iodine ethanol solution.