[22p-P08-1~3] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[22p-P08-3] Development of Humidity Sensor Using Cellulose Nano Fiber for Sensitive Membrane

〇Mutsuto Katoh^1,2, Toru Yahagi¹, Naoya Yamada¹, Shuji Tanaka² (1.Yamagata RIT, 2.Tohoku Univ.)

Keywords:

cellulose nano fiber,humidity sensor

Humidity sensor with cellulose nano fiber (CNF) as a sensitive membrane was developed by MEMS process. As the humidity increases, the impedance of CNF sensors became lower. At the approximately 50% change of relative humidity, the sensor’s impedance change rate grew over 1000 times. It was confirmed that the high impedance responsibility of CNF for humidity changes.