The 84th JSAP Autumn Meeting 2023
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Session Details

Poster presentation13 Semiconductors : 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[22p-P08-1~3]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Sep 22, 2023 4:00 PM - 6:00 PM JST
Fri. Sep 22, 2023 7:00 AM - 9:00 AM UTC
P08 (KJ Hall)
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[22p-P08-1]Proposal of Microfluidic Channel Resonators Fabricated with Au Thermal Diffusion Bonding

〇Atsushi Miura1, Keita Funayama1, Fumihito Arai2, Hiroya Tanaka1 (1.TOYOTA CRDL, 2.Univ. of Tokyo)
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[22p-P08-2]Photoresist removal using highly concentrated ozone water

〇Toshinori Miura1, Naoki Kato1, Akitoshi Nakagawa1, Satoru Seike1 (1.Meidensha Corp.)
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[22p-P08-3]Development of Humidity Sensor Using Cellulose Nano Fiber for Sensitive Membrane

〇Mutsuto Katoh1,2, Toru Yahagi1, Naoya Yamada1, Shuji Tanaka2 (1.Yamagata RIT, 2.Tohoku Univ.)
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