Presentation Information
[23a-A301-3]Influence of Voltage-Pulse Rise Time on Generation of Atmospheric-Pressure Non-equilibrium Plasma
〇Toshiki Nakano1, Takeshi Kitajima1 (1.Natl. Def. Acad.)
Keywords:
atomospheric-pressure plasma,pulse rise time,optical emission spectroscopy
An atmospheric-pressure, non-equilibrium plasma is generated by the short-voltage pulses of 100-150 ns with 10-mm gap electrodes. The plasma is diagnosed by the measurement of electrode gap voltage and current as well as optical emission spectroscopy. When the rise time of the voltage pulses is decreased from 90 ns to 50 ns with the peak voltages adjusted to 1130 V, the electric energy supplied during plasma generation is decreased by 60%. On the other hand, the electron temperature and the O atom number density are found to be increased by 18% and 60%, respectively, from He and O optical emission intensity analysis of the plasma. These results indicate that the decrease in a rise time of voltage pulses applied to the present plasma source enables to lower the electric energy required for plasma generation with increasing amounts of chemically active species in the plasma.