[23a-A301-1~9] 8.1 Plasma production and diagnostics

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[23a-A301-9] Effect of Magnetic Field Distribution and a Diamond Electron Emission Layer on DC discharge Voltage from Hollow Cathode with Axial Magnetic Field

〇Hisao Miyazaki¹, Hisashi Yoshida¹, Shigeya Kimura¹ (1.Toshiba RDC)

Keywords:

plasma source,hollow cathode,diamond

We develop a plasma source which utilizes properties of diamond such as high electron emission yield by a negative electron affinity, a high sputtering resistance against ion bombardment, a high melting point, and a high thermal conductivity. In the previous meeting, we reported a high-current, low-voltage discharge mode from a hollow cathode, whose inside wall was coated by boron-doped diamond (BDD), with an axal magnetic field. In this meeting, we will report a hollow cathode discharge at low gas pressure, which is enabled by a reduction of a peak voltage accompanied by a transition to a hollow-cathode-discharge mode. An optimization of the magnetic field and the existence of the BDD reduced the peak voltage.