[23p-A303-1~8] 13.3 Insulator technology

3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)

[23p-A303-7] Study of solution oxidation of Ge substrates

〇Gen Shimizu¹, Yuta Tsuchiya¹, Hoshiki Harata¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.Tokyo univ. of Agri & Tech)

Keywords:

Semiconductor