[23p-A303-1~8] 13.3 Insulator technology

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[23p-A303-8] Study of water resistance of GeO₂ films

〇(M1)Keita Ishizuka¹, Takumi Suzuki¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.Tokyo univ. of Agri & Tech.)

Keywords:

semiconductor