Presentation Information
[23p-A311-6]Thermoelectric properties of P-doped and B-doped polycrystalline silicon thin films
〇(M2)Keisuke Shibata1, Shinya Kato2, Masashi Kurosawa1, Kazuhiro Gotoh1,3,4, Satoru Miyamoto1, Takashi Itoh1, Noritaka Usami1,5, Yasuyoshi Kurokawa1 (1.Nagoya Univ., 2.Nagoya Inst. Tech., 3.Niigata Univ., 4.IRCNT, Niigata Univ., 5.InFuS, Nagoya Univ.)
Keywords:
semiconductor,silicon,thermoelectric