[23p-B202-1~6] 1.5 Instrumentation, measurement and Metrology

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[23p-B202-3] Characterization of Surface and Cross-Section of Laser Irradiated Aluminum by using Low-Voltage Scanning Electron Microscope

〇Kiyoshi Yase¹, Keiji Houjoh¹, Kazumasa Shimamoto¹, Shin Horiuchi¹, Nao Terasaki¹ (1.AIST)

Keywords:

adhesive,SEM

Surface and Cross-Section of Laser Irradiated Aluminum were observed by using low-voltage SEM to confirm the existence of fine structures with a few hundred nm thickness. It should be the reason of the tight bonding of Al plates.