The 84th JSAP Autumn Meeting 2023

7 Beam Technology and Nanofabrication : 7.2 Applications and technologies of electron beams

Oral presentation

[20p-A501-1~12]7.2 Applications and technologies of electron beams

Wed. Sep 20, 2023 1:00 PM - 4:15 PM JST
Wed. Sep 20, 2023 4:00 AM - 7:15 AM UTC

A501 (KJ Hall)

Katsuhisa Murakami(AIST), Fujio Wakaya(Osaka Univ.)

Download PDF