The 84th JSAP Autumn Meeting 2023

7 Beam Technology and Nanofabrication : 7.3 Micro/Nano patterning and fabrication

Oral presentation

[20a-A501-1~8]7.3 Micro/Nano patterning and fabrication

Wed. Sep 20, 2023 9:00 AM - 11:15 AM JST
Wed. Sep 20, 2023 12:00 AM - 2:15 AM UTC

A501 (KJ Hall)

Jiro Yamamoto(Hitachi), Jun Taniguchi(Tokyo Univ. of Sci.)

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