Presentation Information

[16a-A21-7]Epitaxial Polarity Inversion Process from Ga-polar GaN to N-polar GaN toward Multiple Polarity Inverted Structure Fabrication

〇Kazuhisa Ikeda1, Kanako Ueda1, Masahiro Uemukai1, Tomoyuki Tanikawa1, Ryuji Katayama1 (1.Osaka Univ.)

Keywords:

semiconductor,nitride


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