[16a-A36-1~5] Advanced Technology on the Cyber-Physical System for the Society 5.0 -Connecting with the physical spaces as the technologies of Materials, Devices, Processes, Circuits, and Applications-

12:00 PM - 12:15 PM JST(3:00 AM - 3:15 AM UTC)

[16a-A36-5] Electronic state analysis of nanomaterial devices using multi-scale, multi-dimensional, and multi-modal spectromicroscopy

〇Naoka Nagamura^1,2, Riku Gotoh^1,2, Kenta Oishi^1,2 (1.NIMS, 2.Tokyo Univ. of Sci.)

Keywords:

spectroscopy,imaging,operando analysis

For the development of high-performance devices using low-dimensional nanomaterials, high-spatial-resolution spectromicroscopy is useful for evaluating the surfaces and interfaces in device structures.
In this research, to realize multi-scale, multi-dimensional, and multi-modal spectromicroscopy, we are developing high-throughput peak fitting software for spectral big data analysis using machine learning, operando Raman microscopy equipment, and operando scanning photoelectron microscopy equipment.
We will report on results of electronic state analysis of atomic layer nanodevices using our system.