[16a-C31-1~10] 6.4 Thin films and New materials

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[16a-C31-2] Multilayer with Low Refractive Index SiO₂ Optical Thin Films Deposited by Sputtering and Electron Beam Evaporation (3)

〇(D)Naoya Tajima¹, Hiroshi Murotani¹, Takayuki Matsudaira² (1.Tokai Univ., 2.SHINCRON CO.LTD.)

Keywords:

optical multilayer film,silicon dioxide,packing density