[16a-C31-1~10] 6.4 Thin films and New materials

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[16a-C31-9] Formation factor of the lattice strain in VO₂/TiO₂(001)

〇Yuji Muraoka¹, Reki Nakamoto², HIroyuki Okazaki³, Takanori Wakita¹, Takayoshi Yokoya¹ (1.Okayama Univ. RIIS, 2.Okayama Univ. Grad. Sch., 3.QST)

Keywords:

VO2/TiO2(001),Lattice strain,Laser fluence

Through the preparation experiments of VO₂/TiO₂(001) using pulsed laser deposition (PLD) technique, we have clarified that the thermal energy of surface particles during film growth is important as a factor of the formation of lattice strain in the oxide film. In this presentation, we will present the experimental results of the effect of the laser energy density during film formation on the formation of lattice strain in VO₂/TiO₂(001).