Presentation Information

[16p-A21-5]Homoepitaxial Growth on a-plane AlN Template by HVPE

〇Shunki Ito1, Ryota Akaike1,2, Hiroki Yasunaga2,3, Takao Nakamura1,2,3, Hideto Miyake1,2 (1.Mie Univ., 2.IC-SDF, 3.ORIP)

Keywords:

AlN,HVPE,non-polar


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